There are many comsol multiphysicsbased textbooks and guides written for students, professors, and engineering professionals alike. I think you need to work with comsol for some time to actually understand how good this software is. Uh innovation centre college lane hatfield hertfordshire al10 9ab phone. A novel inplane electrostatic combdrive actuator for mems relaysswitches was designed and.
Electrostatically actuated cantilever comsol multiphysics. Numerical simulation of the electric field and the study. I wish to know what changes i will have to make in order to get a transient dynamic response. Get a general demonstration of coupling a 3d acoustic fluid phenomenon to a solid object in comsol multiphysics. It is observed that with more and more number of spiral ring structure actuation voltages can be reduced. Krichtafovitch1, vivi jayanty1, chihpeng hsu 2, alexander v. With a multiphysics capable simulation tool, you can correctly capture the important aspects of your design. A comsol multiphysicsbased analysis of an innovative thermal actuation system capable of overtaking the traditional electrostatic comb drive, nowadays used for actuating the shutter array of. Use of comsol multiphysics for automated electrostatic mems sensor design jill c. To download the mphfiles, log in or create a comsol access account that is associated with a valid comsol license. This model shows the bending of a cantilever beam under an applied electrostatic load.
A simulation of the behavior of such a thin film of oil in water, forced to move due an electrostatic field, has been made using the levelset, twophase flow application mode and the electrostatic application mode in comsol multiphysics. The smallest components, while often overlooked in design, can be the most instrumental ones. Anyone familiar with 3d electrostatic force calculation. Parker1 1michigan technological university corresponding author. To demonstrate the workflow for building and solving a structural mechanics problem, the comsol multiphysics version 4.
Most of the following steps apply on other models 2. The task at this stage is the definition of a numerical design approach to optimize the device geometry and actuation, enabling a proper fluid transport. Basic concepts and applications with matlab, maple, and comsol, 3 rd edition darrell w. The stepbystep instructions will guide us through the current balance at steady state and the introduction of the multiphysics content in the timedependent heat transfer problem. This is intended to support future design process and prototype realization.
Entire combdrive geometry is covered with the air block. In the course of solving these problems, you will see how easy it is to switch from one traditionally separate step to another. We first start with an example on a very simple electrostatic actuated rf mems switch. On the modelling of electrowetting using comsol multiphysics. Modeling microresonators with electrostatic actuation. Study the effect of thermal stress on resonant frequency.
Abstract a comb drive actuator is a basic actuation device of mems. Can anyone tell me the steps to apply the load and actuation voltage to the beam. When you are modelling mems beams under electrostatic actuation, the. Comsol is the developer of comsol multiphysics software, an interactive environment for modeling and simulating scientific and engineering problems.
Feasibility study of thermal actuators for mems variable emittance. Electromagnetic solenoid actuator, variable valve actuation, simulink, comsol multiphysics, finite element method. With comsol, it is also possible to observe the effects of temperature on the capacitance value. Study of capacitance in electrostatic combdrive actuators. Electrostatic combdrive actuator for mems relaysswitches. How to create electrostatics models with wires, surfaces, and. A multiphysics framework for the geometric optimization. As i am very new to comsol multiphysics, its very difficult for me to find the procedure for it. In this model i make an accurate modeling for electrostatically actuated cantilever on comsol to study its behavior. A single model can incorporate multiple physical properties of the system. The building of an fea model of an electric cell actuator using comsol multiphysics validation of this model through the avid and espi measurement systems the building of an fea model of an electric loudspeaker using comsol multiphysics validation of this model throughan acoustic measurement systems. We can similarly derive the expression for the mechanical force for linear timeharmonic analysis with a dc bias.
The optimization of actuation voltage is achieved by analyzing the flexure design, beam topology, actuation electrodes and gap height using comsol multiphysics models which are validated by simulations. For example, how to determine the force between a dc capacitors plates. Comsol provides an ide and unified workflow for electrical, mechanical, fluid, acoustics and chemical applications. Electrostatic precipitator, industrial exhaust controller, industrial pollution preventer, flue gas cleaner and dust trapper. In addition, comsol multiphysics is much simpler to use than traditional finite element.
The rectangular finger shared the same initial gap g 1, stroke s max, and finger pitch t with the doubletilt finger. Mems applications often require large force, large displacement, lowpower and energyefficient actuators. Comsol requires that every type of simulation included in the package has the ability to be combined with any other. I have the comsol model for static analysis in which the voltage is applied slowly such that the equilibrium exists at every step. Certain characteristics of comsol become apparent with use.
Only the cases of frictionless problem are considered. Electrostatic potential between cylinders 55 3 in the list of application modes, open the comsol multiphysics folder and then the electromagnetics folder. Select electrostatics from the list of electromagnetics application modes. Electrostatic actuation is a common actuation method for microresonators.
Pdf feasibility study of thermal actuators for mems. Displacement of the bottom edge of one side of the micromirror and the top edge of the other side are plotted vs. Comsol multiphysics reference guide 19982012 comsol protected by u. Electrostatically actuated cantilever on comsol youtube. In the example, we solve for the deflections of the membrane in a capacitive pressure sensor.
Various effects are observed, including hysteresis and electrostatic pullin, collapse, and release. In this appendix, we show how to do the following using comsol step by step. May 12, 2012 primo di una serie di tutorial su questo programma utilissimo in ambito ingegneristico. A novel inplane electrostatic combdrive actuator for mems relaysswitches was designed and fabricated. For example, to model joule heating in a structure with temperaturedependent elastic properties, simply enter in. A comsol multiphysics guide is given in appendix of this thesis report that provides information about using this software.
Sep 17, 2014 to demonstrate the workflow for building and solving a structural mechanics problem, the comsol multiphysics version 4. This chapter contains example models of mems actuators such as cantilever. The proposed work is carried out by selecting the electrostatic physics domain in. Jul 12, 2019 the application gallery features comsol multiphysics tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical. The comsol user interface reduces clutter and redundant tasks, so your attention can be focused on the substance of your design studies. Simulation of an adaptive fluidmembrane piezoelectric lens mdpi.
There is a great difference 50% between analytical solution and simulation of vertical comb drive using comsol electromechanics module. Learn how to model these types of systems in comsol multiphysics. Equation from the subsection classical pdes of the comsol multiphysics section pde modes. Numerical simulation of the electric field and the study of. Primo di una serie di tutorial su questo programma utilissimo in ambito ingegneristico. The comsol user interface reduces clutter and redundant. Using the electrostatic field, a contact angle depending on the electric field lippmann can be. The electrostatic force is thus a sum of a dc force and a timeharmonic force at the excitation frequency. Comsol multiphysics is a crossplatform finite element analysis, solver and multiphysics simulation software. The comsol multiphysics approach starts with first principles like transport phenomena, electromagnetic field theory, and solid mechanics as the basic fibers of the.
The video tutorial featured in this blog post shows you how to set up and run a simulation using comsol multiphysics. To this end, the mems module provides predefined user interfaces with associated modeling tools, referred to as physics interfaces, for a variety of coupled physics, including electromagneticstructure, thermalstructure, or fluidstructure interactions. Tutorial on comsol multiphysics platform comsol is a multiphysics platform, which will be used to do all your simulations. Comsol, comsol multiphysics, comsol script, comsol reaction engineering. Comsol multiphysics 3 new additional timedependent solutions operators that you can use for results evaluation, for example.
How to create electrostatics models with wires, surfaces. Particular functionality may be common to several products. The user can simulate a design, test for the capacitance and observe the effects on capacitance by changing parameters such as dielectric permittivity of materials. Use of comsol multiphysics for automated electrostatic. Tutorial 1 introduction i comsol multiphysics youtube. This model example illustrates applications of this type that would nominally be built using the following products. Structural mechanics, nonlinear material models, geomechanics, and assemblies are just some of the many mechanical applications you can model with the software. Modeling an electric cell actuator and loudspeaker using comsol multiphysics w. Capacitive sensor design using comsol provides the user with a wide variety of tools. The calculated static characteristics are implemented in a simulink model to simulate the dynamics of the emva. The comsol user interface reduces clutter and redundant tasks, so your attention can be. The figures below show another version of the mems capacitor model, where the dielectric material is replaced by an anisotropic piezoelectric material pzt5h.
Modeling of coronainduced electrohydrodynamic flow with. Hollow cylinder, a comsol multiphysics tutorial model. How to apply load and actuation voltage to a beam in comsol. Micropump, mems, electrostatic actuation, pullin, multiphysics. Electrostatic actuation is the most popular actuation principle. Modeling mechanical applications in comsol multiphysics. Moreover, such equations may be coupled in an almost arbitrary way. Warning your internet explorer is in compatibility mode and may not be displaying the website correctly.
Speeding up the learning process before you can fully benefit from a product and get the most out of it, you of course need to learn how to use it first. Comsol multiphysics true multiphysics everything can link to everything flexible you can model just about anything. Mamishev 1kronos air technologies 15241 ne 90th st. Comsol multiphysics solves this issue by being an all in one geometry creator and mesher, solver and post processor. Geometry creation and import with comsol multiphysics multiphysics modeling series layla mayboudi comsol heat transfer models multiphysics modeling series. The electrostatic combdrive actuator is modeled and simulated using silicon as material with properties 5 as mentioned in the table i. As i am very new to comsol multiphysics, its very difficult for me to find. Multiphysics modelling and experimental validation of. How to model electromechanics in comsol multiphysics youtube. Learn more about the latest version of the software in this archived webinar. Comsol multiphysics version 4 brings an unprecedented level of clarity to your simulation work by giving you both an organized model overview and a streamlined modelbuilding process. It allows conventional physicsbased user interfaces and coupled systems of partial differential equations pdes. Consequently, comsol multiphysics is ideally suited for mems applications. Doubletilt comb fingers and tilted parallelogram beams were proposed to achieve the requirements of mems relaysswitches.
75 1155 1313 266 1245 1291 308 769 492 798 833 286 1062 1051 10 1204 600 899 477 854 284 663 1268 3 897 1284 1012 763 928 14 1030 1211 141 1137 912 1364 1490 572 858